Title :
Miniature hollow cathode discharges
Author :
Schoenbach, K.H. ; Joshi, R.P.
Author_Institution :
Phys. Electron. Res. Inst., Old Dominion Univ., Norfolk, VA, USA
Abstract :
Summary form only given, as follows. Reducing the cathode hole diameter to about 100 /spl mu/m makes it possible to extend the pressure range for hollow cathode discharge operation to atmospheric pressure. For a submillimeter hollow cathode discharge in neon (at 100 Torr) it was shown that the flow of material in the cathode transforms the originally, cylindrical cathode hole into a spherical cavity. This self-forming phenomenon leads to an unusually stable and reproducible discharge. Possible applications for miniature hollow cathode discharges and discharge arrays, such as flat panel displays and large area light sources have been considered.
Keywords :
glow discharges; 100 micron; 100 torr; Ne; atmospheric pressure; cathode hole diameter; discharge arrays; flat panel displays; large area light sources; miniature hollow cathode discharges; pressure range; reproducible discharge; self-forming phenomenon; stable discharge; submillimeter hollow cathode discharge; Cathodes; Electrodes; Fault location; Laboratories; Lamps; Laser beams; Laser theory; Particle beams; Plasma density; Plasma temperature;
Conference_Titel :
Plasma Science, 1993. IEEE Conference Record - Abstracts., 1993 IEEE International Conference on
Conference_Location :
Vancouver, BC, Canada
Print_ISBN :
0-7803-1360-7
DOI :
10.1109/PLASMA.1993.593597
