Optical MEMS for Future Instruments in Astronomy

MOEMS devices are under study in order to be integrated in next-generation astronomical instruments for ground-based and space telescopes. Their main advantages are their compactness, scalability, specific task customization using elementary building blocks, and remote control. Several laboratories, including Laboratoire d´Astrophysique de Marseille in close collaboration with microtechnology institutes, are engaged since several years in the design, realization and characterization of programmable slit masks for multi-object spectroscopy and micro-deformable mirrors for wavefront correction. First prototypes have been developed and show results matching with the requirements.