DocumentCode
1963427
Title
Passivated Piezoresistive Rotation Angle Sensor Integrated in Micromirror
Author
Sasaki, Minoru ; Tabata, Motoki ; Hane, Kazuhiro
Author_Institution
Toyota Technol. Inst., Nagoya
fYear
2007
fDate
Aug. 12 2007-July 16 2007
Firstpage
193
Lastpage
194
Abstract
A piezoresistive rotation angle sensor integrated in a micromirror device is improved with the passivation film. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation under the electrostatic driving. The rotation angle is measured during the actuation. The passivation film reduces the leak current. The sensor signal shows the better performance showing the smaller hysteresis.
Keywords
integrated optics; micro-optomechanical devices; micromirrors; microsensors; passivation; piezoresistive devices; torsion; actuation; electrostatic driving; hysteresis; micromirror device; passivation film; piezoresistive rotation angle sensor; shear stress; torsion bar; Micromirrors; Piezoresistance; Micromirror; Passivation film; Rotation Angle Sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location
Hualien
Print_ISBN
978-1-4244-0641-8
Type
conf
DOI
10.1109/OMEMS.2007.4373906
Filename
4373906
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