Title :
Integrated Piezo-resistive Positionssensor for Microscanning Mirrors
Author :
Sandner, Thilo ; Conrad, Holger ; Klose, Thomas ; Schenk, Harald
Author_Institution :
Fraunhofer Inst. for Photonic Microsyst., Dresden
fDate :
Aug. 12 2007-July 16 2007
Abstract :
Microscanning mirrors with integrated piezoresistive position sensors are presented. The novel sensor approach is based on intrinsic piezoresistivity of SOI material. It is fully compatible to microscanner technology and requires no additional technological efforts, enabling a cost efficient fabrication process. Integrated 2D position sensors with amplitude sensitivity of Sf= 2.0 mV/V @ 6deg, similar to metallic strain gauges, as well as a good linearity of les 0.5% error of linearity has been realized.
Keywords :
micromirrors; microsensors; piezoresistance; piezoresistive devices; position measurement; silicon-on-insulator; strain gauges; 2D position sensors; SOI material; intrinsic piezoresistivity; metallic strain gauges; microscanner technology; microscanning mirrors; piezoresistive position sensor; Capacitive sensors; Costs; Laser feedback; Linearity; Mechanical sensors; Mirrors; Optical device fabrication; Optical feedback; Optical sensors; Piezoresistance; Optical SOI-MEMS; angular sensor; integrated piezo-resistive position sensor; micro scanning mirror;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373907