Combined Device of Optical Microdisplacement Sensor and PZT-Actuated Micromirror

Author

Akase, K. ; Sawada, R. ; Higurashi, E. ; Kobayashi, T. ; Maeda, R. ; Inokuchi, M. ; Sanada, S. ; Ishikawa, I.

Author_Institution

Kyushu Univ., Fukuoka

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

199

Lastpage

200

Abstract

A combined device of a PZT-film-actuated micromirror and microsensor that can detect linear movement and rotation angle of the mirror has been developed[l]. The micromirror is actuated by vertical movement of two PZT cantilevers formed as a unit on the right and left of the movable mirror and directly connected to it via hinges. By detecting reflected light diffused from a VCSEL (vertical-cavity surface-emitting laser) toward the mirror, using two photodiodes (one on each side), displacement and rotation angle are measured with high precision. Since this combined device can feed back the displacement and rotation angle obtained from the sensor, it can compensate for the hysteresis of PZT and therefore enable stable, high-precision optical beam control.

Keywords

displacement measurement; micromirrors; microsensors; optical sensors; piezoelectric materials; PZT-actuated micromirror; VCSEL; displacement measurement; linear movement detection; microsensor; mirror rotation angle detection; optical beam control; optical microdisplacement sensor; photodiodes; rotation angle measurement; vertical-cavity surface-emitting laser; Displacement measurement; Fasteners; Micromirrors; Microsensors; Mirrors; Optical devices; Optical sensors; Photodiodes; Surface emitting lasers; Vertical cavity surface emitting lasers; Microdisplacement sensor; PZT-Actuated Micromirror; Photodiode; VCSEL;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373909

Filename

4373909