DocumentCode
1963715
Title
In Situ Surface Characterization by Elastic Light Scattering
Author
Epler, J.E. ; Schweizer, H.P.
Author_Institution
Paul Scherrer Institute Zurich
fYear
1992
fDate
8-11 Jun 1992
Firstpage
25
Lastpage
26
Keywords
Gallium arsenide; Indium phosphide; Light scattering; MOCVD; Molecular beam epitaxial growth; Monitoring; Particle scattering; Substrates; Surface topography; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.664917
Filename
664917
Link To Document