Title :
Integrated Sensor System for Humidity Sensing of Robots Using Analog Mixed CMOS Technology
Author :
Lee, Sung P. ; Lee, Ji G. ; Chang, Joong W. ; Kim, Joo N. ; Lee, Sang H. ; Chowdhury, Shaestagir
Author_Institution :
Dept. of Electron. Eng., Kyungnam Univ., Masan
Abstract :
Integrated humidity sensor system with Op amp was designed using analog mixed CMOS technology and their electrical properties were investigated. The integrated sensor system consisted of Wheatstone-bridge HUSFET (humidity sensitive field effect transistors) sensor blocks, a resistive humidity sensor block, a diode temperature sensor, and Op amp blocks. Simulated Op amp revealed that DC gain was over 84 dB, unity gain bandwidth was about 10 Mhz, and slew rate was over 10 V/uS. The drain current of an n-type HUSFET increased from 0.83 to 1.14 mA as relative humidity increases from 10 to 70 %RH..
Keywords :
CMOS analogue integrated circuits; humidity sensors; mixed analogue-digital integrated circuits; robots; Op amp blocks; Wheatstone-bridge HUSFET; analog mixed CMOS technology; diode temperature sensor; humidity sensitive field effect transistors sensor blocks; integrated sensor system; resistive humidity sensor block; robot humidity sensing; Bandwidth; CMOS technology; Diodes; FETs; Gain; Humidity; Operational amplifiers; Robot sensing systems; Sensor systems; Temperature sensors; HUSFET; Integrated sensors; Wheatstone bridge; analog mixed CMOS;
Conference_Titel :
Robotic and Sensors Environments, 2007. ROSE 2007. International Workshop on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
978-1-4244-1526-7
Electronic_ISBN :
978-1-4244-1527-4
DOI :
10.1109/ROSE.2007.4373962
