Enhanced sensitivity computation for BEM based capacitance extraction using the Schur complement technique

This paper presents a useful extension for an existing algorithm of capacitance sensitivity computation with respect to multiple geometric variations. The existing algorithm is applicable for BEM-based capacitance extraction tools and provides good accuracy results. Using the Schur complement technique, the extended algorithm can achieve an even better accuracy at a modest increase of computational cost. With such extension, the enhanced algorithm becomes more flexible in the sense that it is able to provide different solutions for different application requirements: high efficiency with good accuracy or high accuracy with modest time cost.