Title :
A physical and chemical study of ArF laser irradiation on polycarbonate surface
Abstract :
This work describes a physical and chemical study on polycarbonate surface irradiated by ArF (193 nm) excimer laser. The profile of the polymer surface under different UV energy densities due to photoablation has been studied
Keywords :
absorption coefficients; attenuated total reflection; laser ablation; photolysis; polymer structure; polymers; surface chemistry; 193 nm; IR attenuated total reflection; ablation rate; excimer laser irradiation; laser induced photodegradation; photoablation; photolysis; polycarbonate surface; ring substitution; superficial crosslinking formation; Chemical lasers; Laser theory; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-7105-4
DOI :
10.1109/LEOS.2001.968954
