A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor

Author

Elsayed, A. ; Elshennawy, A. ; Elmallah, A. ; Shaban, A. ; George, B. ; Elmala, M. ; Ismail, A. ; Wassal, A. ; Sakr, M. ; Mokhtar, A. ; Hafez, M. ; Hamed, A. ; Saeed, M. ; Samir, M. ; Hammad, M. ; Elkhouly, M. ; Kamal, A. ; Rabieah, M. ; Elghufaili, A. ;

Author_Institution

ASIC Solutions Div., Si-Ware Syst., Cairo, Egypt

fYear

2011

fDate

19-21 Sept. 2011

Firstpage

1

Lastpage

4

Abstract

An interface for MEMS gyroscope is implemented in 0.18μm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.

Keywords

CMOS integrated circuits; application specific integrated circuits; feedback; microsensors; sigma-delta modulation; HVCMOS technology; MEMS gyroscope; electromechanical ΣΔ force-feedback; gyroresonance; low noise floor; on-chip reference generation; self-clocked ASIC interface; temperature compensation; Application specific integrated circuits; Floors; Gyroscopes; Micromechanical devices; Modulation; Noise; Temperature sensors; Coriolis force; Force feedback; MEMS; Self-clocking; Sigma delta modulation; gyroscopes;

fLanguage

English

Publisher

ieee

Conference_Titel

Custom Integrated Circuits Conference (CICC), 2011 IEEE

Conference_Location

San Jose, CA

ISSN

0886-5930

Print_ISBN

978-1-4577-0222-8

Type

conf

DOI

10.1109/CICC.2011.6055369

Filename

6055369