Title :
A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor
Author :
Elsayed, A. ; Elshennawy, A. ; Elmallah, A. ; Shaban, A. ; George, B. ; Elmala, M. ; Ismail, A. ; Wassal, A. ; Sakr, M. ; Mokhtar, A. ; Hafez, M. ; Hamed, A. ; Saeed, M. ; Samir, M. ; Hammad, M. ; Elkhouly, M. ; Kamal, A. ; Rabieah, M. ; Elghufaili, A. ;
Author_Institution :
ASIC Solutions Div., Si-Ware Syst., Cairo, Egypt
Abstract :
An interface for MEMS gyroscope is implemented in 0.18μm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.
Keywords :
CMOS integrated circuits; application specific integrated circuits; feedback; microsensors; sigma-delta modulation; HVCMOS technology; MEMS gyroscope; electromechanical ΣΔ force-feedback; gyroresonance; low noise floor; on-chip reference generation; self-clocked ASIC interface; temperature compensation; Application specific integrated circuits; Floors; Gyroscopes; Micromechanical devices; Modulation; Noise; Temperature sensors; Coriolis force; Force feedback; MEMS; Self-clocking; Sigma delta modulation; gyroscopes;
Conference_Titel :
Custom Integrated Circuits Conference (CICC), 2011 IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4577-0222-8
DOI :
10.1109/CICC.2011.6055369
