Title :
Fabrication of lnGaAs Strained Quantum Wires Using Selective MOCVD Growth on SiO2-Patterned GaAs Substrate
Author :
Nishioka, M. ; Tsukamoto, S. ; Tanaka, T. ; Nagamune, Y. ; Arakawa, Y.
Author_Institution :
University of Tokyo, Japan
Keywords :
Chemical technology; Chemical vapor deposition; Crystallization; Electrons; Fabrication; Gallium arsenide; Indium gallium arsenide; MOCVD; Substrates; Wires;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664936