Title :
The method for dual-beam laser heterodyne ultra-precision measurement of the glass thickness
Author :
Yanchao Li ; Yanling Yang ; Xuesong Xia ; Long Gao ; Haifang Cong ; Chunhui Wang
Author_Institution :
Nat. Key Lab. of Tunable Laser Technol., Harbin Inst. of Technol., Harbin, China
Abstract :
A method for measuring thickness of glass is proposed based on laser heterodyne measurement and Doppler measurement, the largest error of simulation results is 0.8%.
Keywords :
glass; measurement by laser beam; Doppler measurement; dual-beam laser heterodyne ultra-precision measurement; glass thickness; laser heterodyne measurement; Frequency; Glass; Laser modes; Laser radar; Optical mixing; Optical reflection; Optical refraction; Optical surface waves; Thickness measurement; Time measurement; Dual-beam laser heterodyne; Heterodyne detection; Laser Doppler Technology; Non-contact measurement;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292079
