Title :
3D fabrication of waveguide and grating coupler in SU-8 by optimized gray scale electron beam lithography
Author :
Dong, Lin ; Iyer, Srinivasan ; Popov, Sergei ; Friberg, Ari
Author_Institution :
Div. of Opt., R. Inst. of Technol., Kista, Sweden
Abstract :
Gray scale electron beam lithography is optimized for simple and accurate prototyping of 3D waveguides and grating output couplers in SU-8. Gratings with complex profiles and free of lag effect can be realized with this technique.
Keywords :
diffraction gratings; electron beam lithography; optical couplers; optical fabrication; optical polymers; optical waveguides; 3D fabrication; SU-8; grating coupler; lag effect; optimized grayscale electron beam lithography; waveguide coupler; Couplers; Electron beams; Fabrication; Gratings; Lithography; Optical waveguides; Three dimensional displays;
Conference_Titel :
Communications and Photonics Conference and Exhibition (ACP), 2010 Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-7111-9
DOI :
10.1109/ACP.2010.5682619
