Title :
Lattice-Matched Growth of lnPSb on lnAs by Low Pressure Plasma-MOVPE
Author :
Stoll, B. ; Behet, M. ; Heime, K.
Author_Institution :
Institut fur Halbleitertechnik, RWTH Aachen, Deutschland
Keywords :
Epitaxial growth; Epitaxial layers; Gallium arsenide; Lattices; Plasma materials processing; Plasma properties; Plasma temperature; Solids; Superlattices; Thermal stability;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664945