Title :
In Situ Control of Heterointerface Quality in MOVPE by Surface Photo-Absorption
Author :
Kobayashi, Naoki ; Kobayashi, Yasuyuki
Author_Institution :
NTT Basic Research Laboratories, Tokyo
Keywords :
Atom optics; Capacitive sensors; Electron optics; Epitaxial growth; Epitaxial layers; Indium phosphide; Laboratories; Reflectivity; Substrates; Temperature;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664949