Title :
The road to better reliability and yield embedded DfM tools
Author :
Veelenturf, Kees
Author_Institution :
Philips Semicond., Nijmegen, Netherlands
Abstract :
This paper gives an overview of the different tools, needed for accomplishing optimal IC manufacturability and rapid technology learning during the successive phases of process maturity. The paper then describes two specific DfM tools that are in use within Philips Semiconductors
Keywords :
VLSI; design for manufacture; integrated circuit reliability; integrated circuit yield; monolithic integrated circuits; MARYL tool; Philips Semiconductors; VLSI circuits; optimal IC manufacturability; rapid technology learning; reliability; wire spreading; yield embedded DFM tools; yield enhancement tool; yield loss; yield prediction; Circuit testing; Design for manufacture; Design for testability; Integrated circuit technology; Libraries; Manufacturing processes; Process design; Semiconductor device manufacture; Semiconductor device testing; Virtual manufacturing;
Conference_Titel :
Design, Automation and Test in Europe Conference and Exhibition 2000. Proceedings
Conference_Location :
Paris
Print_ISBN :
0-7695-0537-6
DOI :
10.1109/DATE.2000.840017
