Title :
Memory-Technologies: Pace-Setters for the IC-Industry
Author :
Klose, H. ; Dehm, C. ; Mueller, G. ; Scheibe, C. ; Schumann, D. ; Sitaram, A.R.
Author_Institution :
Infineon Technologies AG, Germany
fDate :
11-13 September 2001
Keywords :
Capacitors; Circuits; DRAM chips; Dielectric constant; High K dielectric materials; Inverters; Leakage current; Paper technology; Random access memory; Silicon;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195202
