DocumentCode
1969951
Title
The Role of Technology CAD in Early Process Development
Author
Puchner, Helmut
Author_Institution
LSI Logic Corporation, USA
fYear
2001
fDate
11-13 September 2001
Firstpage
51
Lastpage
58
Keywords
Calibration; Computational modeling; Computer simulation; Doping profiles; Geometry; Large scale integration; Manufacturing; Predictive models; Silicon on insulator technology; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN
2-914601-01-8
Type
conf
DOI
10.1109/ESSDERC.2001.195203
Filename
1506585
Link To Document