Title :
Thin (2-4nm) Medium and High-k Dielectrica: A Challenge for Physical Metrology
Author_Institution :
IMEC, Belgium
fDate :
11-13 September 2001
Keywords :
High K dielectric materials; High-K gate dielectrics; Metrology;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195204
