DocumentCode :
1970160
Title :
NO oxides for low noise 0.18um analog CMOS
Author :
Da Rold, M. ; Simoen, E. ; De Jaeger, B. ; Lietaer, N. ; Rothschild, A. ; De Keersgieter, A. ; Decoutere, S.
Author_Institution :
IMEC, Leuven, Belgium
fYear :
2001
fDate :
11-13 September 2001
Firstpage :
111
Lastpage :
114
Keywords :
Acoustical engineering; Annealing; Boron; CMOS process; CMOS technology; MOS devices; Nitrogen; Noise level; Oxidation; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
Type :
conf
DOI :
10.1109/ESSDERC.2001.195213
Filename :
1506595
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1970160