مرکز منطقه ای اطلاع رساني علوم و فناوري - Metal Organics Chemical Vapor Deposition of YBa2Cu3 O7-x Using a Special Equipment for Solid Precursors

DocumentCode :

1970384

Title :

Metal Organics Chemical Vapor Deposition of YBa₂Cu₃ O_7-x Using a Special Equipment for Solid Precursors

Author :

Sant, C. ; Gibart, P. ; Genou, P. ; Verie, C.

Author_Institution :

LPSES-CNRS, Sophia Antipolis, France

fYear :

1992

fDate :

8-11 Jun 1992

Firstpage :

Lastpage :

Keywords :

Chemical analysis; Chemical vapor deposition; MOCVD; Optical films; Organic chemicals; Pareto analysis; Temperature; Yttrium barium copper oxide;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN :

0-87942-652-7

Type :

conf

DOI :

10.1109/MOVPE.1992.664957

Filename :

664957

Link To Document :