DocumentCode

1970384

Title

Metal Organics Chemical Vapor Deposition of YBa₂Cu₃ O_7-x Using a Special Equipment for Solid Precursors

Author

Sant, C. ; Gibart, P. ; Genou, P. ; Verie, C.

Author_Institution

LPSES-CNRS, Sophia Antipolis, France

fYear

1992

fDate

8-11 Jun 1992

Firstpage

96

Lastpage

97

Keywords

Chemical analysis; Chemical vapor deposition; MOCVD; Optical films; Organic chemicals; Pareto analysis; Temperature; Yttrium barium copper oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

conf

DOI

10.1109/MOVPE.1992.664957

Filename

664957