DocumentCode

1970386

Title

A Manufacturable Sub-50nm PMOSFET Technology

Author

Loo, J.J.G.P. ; Ponomarev, Y.V. ; Kaiser, M. ; Verheijen, M.A. ; Cubaynes, F.N. ; Dachs, C.J.J.

Author_Institution

Philips Research Leuven, Belgium

fYear

2001

fDate

11-13 September 2001

Firstpage

147

Lastpage

150

Keywords

Annealing; Etching; Implants; Leakage current; Lithography; MOSFET circuits; Manufacturing; Resists; Silicon; Space technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2001. Proceeding of the 31st European

Print_ISBN

2-914601-01-8

Type

conf

DOI

10.1109/ESSDERC.2001.195222

Filename

1506604