Title :
Dielectric Discharging processes in RF-MEMS Capacitive Switches
Author :
Papaioannou, George ; Papandreou, Eleni ; Papapolymerou, John ; Daigler, Richard
Author_Institution :
Phys. Dept. Nat. Kapodistrian, Univ. of Athens, Athens
Abstract :
The discharging processes in silicon nitride dielectric film of RF-MEMS capacitive switches are investigated for the first time. The study includes the dependence of discharging as a function of temperature that allows the detection of thermally activated mechanisms. The discharging time constants were found to depend only on temperature and not on the actuation bias polarity.
Keywords :
dielectric thin films; microswitches; silicon compounds; RF-MEMS capacitive switches; dielectric discharging process; microelectromechanical devices; silicon nitride dielectric film; thermally activated mechanism; Bridge circuits; Dielectric films; Dielectric materials; MIM capacitors; Micromechanical devices; Physics; Polarization; Radiofrequency microelectromechanical systems; Space charge; Switches; Dielectric polarization; microelectromechani-cal devices; reliability; surface charging;
Conference_Titel :
Microwave Conference, 2007. APMC 2007. Asia-Pacific
Conference_Location :
Bangkok
Print_ISBN :
978-1-4244-0748-4
Electronic_ISBN :
978-1-4244-0749-1
DOI :
10.1109/APMC.2007.4554527
