Title :
MEMS shock sensor fabricated on flexible substrate
Author :
Lakamraju, Narendra V. ; Phillips, Stephen M. ; Venugopal, Sameer M. ; Allee, David R.
Author_Institution :
Flexible Display Center & Electr. Eng., Arizona State Univ., AZ
Abstract :
Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors on flexible substrates, none of the sensors have been integrally fabricated on the substrate. Fabricating MEMS sensors on flexible substrates along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry, a research topic currently of great interest.
Keywords :
amorphous semiconductors; capacitive sensors; flexible displays; microfabrication; microsensors; shock measurement; silicon compounds; MEMS capacitive sensor fabrication; MEMS shock sensor fabrication; SiN; acoustic detection; blast dosimetry application; flexible amorphous silicon process; flexible display; flexible substrate; silicon nitride; Acoustic applications; Acoustic sensors; Acoustic signal detection; Amorphous silicon; Capacitive sensors; Displays; Dosimetry; Electric shock; Micromechanical devices; Temperature sensors; Flexible; MEMS; Sensor; Shock;
Conference_Titel :
Flexible Electronics & Displays Conference and Exhibition, 2009.
Conference_Location :
Phoenix, AZ
Print_ISBN :
978-1-4244-4338-3
Electronic_ISBN :
978-1-4244-4340-6
DOI :
10.1109/FEDC.2009.5069281
