MEMS shock sensor fabricated on flexible substrate

Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors on flexible substrates, none of the sensors have been integrally fabricated on the substrate. Fabricating MEMS sensors on flexible substrates along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry, a research topic currently of great interest.