DocumentCode
1970796
Title
Laser interferometric mapping of smart power ESD protection devices with different blocking capabilities
Author
Bychikhin, S. ; Litzenberger, M. ; Kamvar, P. ; Pogany, D. ; Fürböck, C. ; Gornik, E. ; Groos, G. ; Stecher, M.
Author_Institution
Technical University Vienna, Austria
fYear
2001
fDate
11-13 September 2001
Firstpage
231
Lastpage
234
Keywords
Breakdown voltage; Electrostatic discharge; Electrostatic interference; Optical interferometry; Phase measurement; Phase shifting interferometry; Power lasers; Protection; Temperature; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN
2-914601-01-8
Type
conf
DOI
10.1109/ESSDERC.2001.195243
Filename
1506625
Link To Document