Title :
Laser interferometric mapping of smart power ESD protection devices with different blocking capabilities
Author :
Bychikhin, S. ; Litzenberger, M. ; Kamvar, P. ; Pogany, D. ; Fürböck, C. ; Gornik, E. ; Groos, G. ; Stecher, M.
Author_Institution :
Technical University Vienna, Austria
fDate :
11-13 September 2001
Keywords :
Breakdown voltage; Electrostatic discharge; Electrostatic interference; Optical interferometry; Phase measurement; Phase shifting interferometry; Power lasers; Protection; Temperature; Thermal stresses;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195243
