• DocumentCode
    1970796
  • Title

    Laser interferometric mapping of smart power ESD protection devices with different blocking capabilities

  • Author

    Bychikhin, S. ; Litzenberger, M. ; Kamvar, P. ; Pogany, D. ; Fürböck, C. ; Gornik, E. ; Groos, G. ; Stecher, M.

  • Author_Institution
    Technical University Vienna, Austria
  • fYear
    2001
  • fDate
    11-13 September 2001
  • Firstpage
    231
  • Lastpage
    234
  • Keywords
    Breakdown voltage; Electrostatic discharge; Electrostatic interference; Optical interferometry; Phase measurement; Phase shifting interferometry; Power lasers; Protection; Temperature; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2001. Proceeding of the 31st European
  • Print_ISBN
    2-914601-01-8
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2001.195243
  • Filename
    1506625