DocumentCode

1970823

Title

Selective Area Growth Of GaAs and AlGaAs with TMGa, TMAI, AsH₃ and HCI by Atmospheric Pressure MOVPE

Author

Korte, Lutz ; Thanner, Christine

Author_Institution

SIEMENS Research Laboratories, Germany

fYear

1992

fDate

8-11 Jun 1992

Firstpage

99

Lastpage

99

Keywords

Ash; Gallium arsenide; Human computer interaction;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

conf

DOI

10.1109/MOVPE.1992.664959

Filename

664959