Title :
Selective Area Growth Of GaAs and AlGaAs with TMGa, TMAI, AsH3 and HCI by Atmospheric Pressure MOVPE
Author :
Korte, Lutz ; Thanner, Christine
Author_Institution :
SIEMENS Research Laboratories, Germany
Keywords :
Ash; Gallium arsenide; Human computer interaction;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664959
