DocumentCode
1970833
Title
Gate current scaling rules characterization, an efficient tool for gate oxide optimisation in 0.12 um CMOS technologies
Author
Toren, Willem-Jan ; Arnaud, Franck
Author_Institution
Philips Semiconductors, Crolles, France
fYear
2001
fDate
11-13 September 2001
Firstpage
243
Lastpage
246
Keywords
CMOS technology; Current measurement; Digital circuits; Energy consumption; Leakage current; MOSFETs; Semiconductor device modeling; Tellurium; Thickness measurement; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN
2-914601-01-8
Type
conf
DOI
10.1109/ESSDERC.2001.195246
Filename
1506628
Link To Document