• DocumentCode
    1970833
  • Title

    Gate current scaling rules characterization, an efficient tool for gate oxide optimisation in 0.12 um CMOS technologies

  • Author

    Toren, Willem-Jan ; Arnaud, Franck

  • Author_Institution
    Philips Semiconductors, Crolles, France
  • fYear
    2001
  • fDate
    11-13 September 2001
  • Firstpage
    243
  • Lastpage
    246
  • Keywords
    CMOS technology; Current measurement; Digital circuits; Energy consumption; Leakage current; MOSFETs; Semiconductor device modeling; Tellurium; Thickness measurement; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2001. Proceeding of the 31st European
  • Print_ISBN
    2-914601-01-8
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2001.195246
  • Filename
    1506628