Title :
Investigations on the Influence of Masks on the Nature of Selective Area Epitaxy
Author :
Thompson, J. ; Maunq, N. ; Wood, A.K. ; Carr, N. ; Charles, P.M. ; Moseley, A.J. ; Chew, A. ; Sykes, D. ; Pritchard, R. ; Hamilton, B.
Author_Institution :
GEC-Marconi Material Technology Limited, Caswell, UK
Keywords :
Composite materials; Epitaxial growth; Epitaxial layers; Indium phosphide; Optical losses; Optical materials; Optical waveguides; Substrates; Waveguide junctions; Waveguide lasers;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664960
