Title :
Double-Gate MOSFETs: Is Gate Alignment Mandatory?
Author :
Allibert, F. ; Zaslavsky, A. ; Pretet, J. ; Cristoloveanu, S.
Author_Institution :
LPCS, Grenoble, France and SOITEC S.A., France
fDate :
11-13 September 2001
Keywords :
CMOS technology; Chemical technology; Electronic mail; MOSFETs; Manufacturing; Semiconductor films; Transconductance; Voltage;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195252
