DocumentCode :
1971054
Title :
MOEMS gyroscope based on acoustooptic mode coupling
Author :
Lu, Shu-xiang ; Chen, Shu-fen ; Zhao, Yi
Author_Institution :
Dept. of Opto-Electron. Eng., Beijing Inst. of Technol., Beijing, China
fYear :
2010
fDate :
8-12 Dec. 2010
Firstpage :
292
Lastpage :
293
Abstract :
A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg-1s-1 in the angular rate range of 0 -400deg/s.
Keywords :
acousto-optical devices; electro-optical modulation; gyroscopes; micro-optomechanical devices; optical waveguide components; surface acoustic wave sensors; LiNbO3; MOEMS gyroscope; acoustooptic mode coupling; electro-optical modulator; optical waveguide diffractive component; surface acoustic wave sensor; Gyroscopes; Optical reflection; Optical sensors; Optical surface waves; Optical waveguides; Surface acoustic waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Communications and Photonics Conference and Exhibition (ACP), 2010 Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-7111-9
Type :
conf
DOI :
10.1109/ACP.2010.5682718
Filename :
5682718
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1971054
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