DocumentCode :
1971094
Title :
Resonant Frequency of Superposed Dielectric Resonators: Application to the Determination of the Local Dielectric Permittivity of M.I.C. Substrates
Author :
Clapeau, M. ; Guillon, P. ; Garault, Y.
fYear :
1977
fDate :
5-8 Sept. 1977
Firstpage :
545
Lastpage :
549
Abstract :
Several methods have been described to measure the permittivity of dielectric substrate, and all used the complete area of the sample and so give an average value of this parameter. But in the realization of microwave integrated circuits it is important to know dielectric parameters of the substrate at the point where the component is located. For this local characterization, we propose a method in which the substrate is in sandwich between two similar dielectric resonators. This non destructive method permits to determine the permittivity of a small area (few mm2) of the substrate, by comparing the measured and calculated resonant frequencies of the studied structure.
Keywords :
Area measurement; Dielectric constant; Dielectric measurements; Dielectric substrates; Integrated circuit measurements; Magnetic resonance; Microwave integrated circuits; Permittivity measurement; Resonant frequency; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Conference, 1977. 7th European
Conference_Location :
Copenhagen, Denmark
Type :
conf
DOI :
10.1109/EUMA.1977.332482
Filename :
4131131
Link To Document :
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