Title :
Design of Integrated RF Modules with Process Control Monitors on Liquid Crystalline Polymer Substrates for Large Volume Manufacturing
Author :
Seo, Chung-Seok ; Min, Sung-Hwan ; Ward, Chris ; Wallace, Peter ; White, George ; Swaminathan, Madhavan
Author_Institution :
Jacket Micro Devices, Inc., Atlanta, GA
Abstract :
In this paper, we present process control monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.
Keywords :
Monte Carlo methods; integrated circuit design; liquid crystal polymers; manufacturing processes; multilayers; process control; process monitoring; radiofrequency integrated circuits; Monte Carlo simulation; integrated RF modules; large volume manufacturing; liquid crystalline polymer substrates; organic multilayers; process control monitors; Circuit testing; Costs; Crystallization; Liquid crystal polymers; Manufacturing processes; Nonhomogeneous media; Phase change materials; Process control; Radio frequency; Substrates; High-K; LCP; Measurement; Modeling; Module design; Multilayer organic; PCM; Test; Yield; component;
Conference_Titel :
Microwave Conference, 2007. APMC 2007. Asia-Pacific
Conference_Location :
Bangkok
Print_ISBN :
978-1-4244-0748-4
Electronic_ISBN :
978-1-4244-0749-1
DOI :
10.1109/APMC.2007.4554561
