Title :
Leakage Current in Ultra Thin Oxides: SILC or Soft Breakdown?
Author :
Cester, A. ; Bandiera, L. ; Paccagnella, A. ; Ghidini, G.
Author_Institution :
University of Padova, Italy
fDate :
11-13 September 2001
Keywords :
Electric breakdown; Leakage current;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195301
