Title :
A Self-aligned Bottom Gate Poly-Si TFT Technology
Author :
Zhang, Shengdong ; Han, Ruqi ; Chan, Mansun
Author_Institution :
Peking University, China
fDate :
11-13 September 2001
Keywords :
Application specific integrated circuits; Crystallization; Fabrication; Flat panel displays; Microelectronics; Parasitic capacitance; Partial response channels; Surfaces; Temperature; Thin film transistors;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195304
