• DocumentCode
    1972184
  • Title

    Ultrafast laser micro and nano processing — the state of the art and future perspective

  • Author

    Sugioka, Koji

  • Author_Institution
    Adv. Sci. Inst., RIKEN, Wako, Japan
  • fYear
    2009
  • fDate
    30-3 Aug. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Over the past few decades, ultrafast laser has become a common tool for micro and nano processing, and is now widely used for both fundamental researches and practical applications. In this lecture, the state of the art and future perspective of ultrafast laser processing are reviewed.
  • Keywords
    laser materials processing; ultrafast laser microprocessing; ultrafast laser nanoprocessing; ultrafast laser processing; Absorption; Glass; Interference; Laser beams; Nanobioscience; Nanostructures; Optical materials; Optical pulses; Optical waveguides; Spatial resolution; femtosecond laser; micro processing; nano processing; ultrafast laser;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-3829-7
  • Electronic_ISBN
    978-1-4244-3830-3
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2009.5292231
  • Filename
    5292231
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1972184