DocumentCode :
1972291
Title :
Multi-axis Force Sensor Using Piezoresistors and a Plate-Like Structure
Author :
Eguchi, H. ; Yamazaki, Hiroshi ; Takahashi, Junji ; Kosaka, D. ; Matsumoto, Shinichi ; Akahori, Tomoyuki ; Ohta, E. ; Kimura, Yuichi ; Izumi, Kiyotaka
Author_Institution :
R&D Center Ridoh CO., Ltd.
fYear :
1988
fDate :
Oct. 31 1988-Nov. 2 1988
Firstpage :
563
Lastpage :
567
Keywords :
Bridge circuits; Capacitive sensors; Force sensors; Hermetic seals; Mechanical sensors; Piezoresistive devices; Research and development; Robot sensing systems; Sensor phenomena and characterization; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Robots, 1988., IEEE International Workshop on
Conference_Location :
Tokyo, Japan
Type :
conf
DOI :
10.1109/IROS.1988.593664
Filename :
593664
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1972291
