• DocumentCode
    1972433
  • Title

    Fabrication of deep microtrenches with inclined parts by laser-induced backside wet etching

  • Author

    Sato, Tadatake ; Kurosaki, Ryozo ; Kawaguchi, Yoshizo ; Narazaki, Aiko ; Niino, Hiroyuki

  • Author_Institution
    Photonics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2009
  • fDate
    30-3 Aug. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Deep trenches with inclined parts were fabricated with laser-induced backside wet etching by gradual shifting the irradiation area. Inclined parts with tilting angle of up to 30deg could be fabricated.
  • Keywords
    laser beam etching; laser materials processing; microfabrication; optical fabrication; deep microtrenches fabrication; laser-induced backside wet etching; Glass; Laser theory; Micromachining; Optical device fabrication; Optical materials; Optical microscopy; Optical pulses; Scanning electron microscopy; Silicon compounds; Wet etching; Laser micromachining; Laser-induced backside wet etching; Silica glass;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-3829-7
  • Electronic_ISBN
    978-1-4244-3830-3
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2009.5292241
  • Filename
    5292241
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1972433