Title :
Low-energy femtosecond laser micromachining for fabrication of CNT-based field emitter arrays
Author :
Baek, I.H. ; Hong, N.T. ; Lee, S. ; Ahn, Y.H. ; Kim, K. ; Rotermund, F.
Author_Institution :
Div. of Energy Syst. Res., Ajou Univ., Suwon, South Korea
Abstract :
A low-energy femtosecond laser micromachining system, which is effectively applied to fabricate micro-structured carbon nanotube field emitter arrays with different tip sizes and shapes, is presented. Superior emission characteristics are obtained with the patterned structures.
Keywords :
carbon nanotubes; field emitter arrays; high-speed optical techniques; laser beam machining; C; field emitter arrays; low-energy femtosecond laser micromachining; microstructured carbon nanotube; patterned structures; superior emission; Carbon nanotubes; Electron emission; Field emitter arrays; Laser noise; Machining; Micromachining; Optical arrays; Optical device fabrication; Optical materials; Surface emitting lasers; carbon nanotube; femtosecond laser; field emitter; micromachining;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292248
