Title :
Electrostatic deposition of CVD particles for fabrication of ultra-fine ceramic filter
Author :
Yamamoto, Hideo ; Masuda, Senichi
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
A novel method for forming a ceramic membrane is described. Ultrafine particles of silicon nitride synthesized by thermally activated CVD (chemical vapor deposition) were deposited on an outer wall surface of a porous ceramic tube (substrate) by electrostatic force and sintered in an inert gas atmosphere. A ceramic electrode assembly using surface discharge was used for charging ultrafine particles at an elevated temperature. A unique ceramic membrane with a three-dimensional network, suitable for use as a fiber filter, was obtained by this method. Its effective pore size was around 0.2-1.0 mu m in diameter, and its porosity was extremely high. This structure has a special advantage with respect to membrane separation not observed in conventional ceramic filters, in that it allows microfiltration with a very low pressure drop.<>
Keywords :
ceramics; chemical vapour deposition; electrostatic precipitators; filtration; 0.2 to 1.0 micron; electrostatic deposition; inert gas atmosphere; microfiltration; porosity; porous ceramic tube; surface discharge; thermally activated CVD; ultra-fine ceramic filter; Biomembranes; Ceramics; Chemical vapor deposition; Electrostatics; Fabrication; Filters; Silicon; Surface charging; Surface discharges; Thermal force;
Conference_Titel :
Industry Applications Society Annual Meeting, 1989., Conference Record of the 1989 IEEE
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/IAS.1989.96947
