Title :
Very Smooth AIGaAs-GaAs Quantum Wells Grown by Metalorganic Chemical Vapor Deposition
Author :
Dupuis, Russell D. ; Neff, James G. ; Pinzone, Christopher J.
Author_Institution :
Department of Electrical and Computer Engineering, The University of Texas at Austin
Keywords :
Chemical vapor deposition; Epitaxial growth; Gallium arsenide; MOCVD; Microelectronics; Molecular beam epitaxial growth; Quantum well devices; Quantum well lasers; Substrates; Temperature distribution;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664970