Femtosecond laser stereolithography and replication technique for MEMS application

Author

Maruo, Shoji

Author_Institution

Dept. of Mech. Eng., Yokohama Nat. Univ., Yokohama, Japan

fYear

2009

fDate

30-3 Aug. 2009

Firstpage

1

Lastpage

2

Abstract

Several types of optically driven micromachines such as a lobed micropump, viscous micropumps and micromanipulators were developed using two-photon microstereolithography. The movable microdevices can be reproduced by a membrane-assisted transfer molding process.

Keywords

high-speed optical techniques; laser materials processing; membranes; micro-optomechanical devices; microfabrication; replica techniques; soft lithography; stereolithography; transfer moulding; two-photon processes; MEMS application; femtosecond laser stereolithography; lobed micropump; membrane-assisted transfer molding process; micromanipulators; movable microdevices; optically driven micromachines; replication technique; two-photon microstereolithography; viscous micropumps; Biomedical optical imaging; Biomembranes; Charge carrier processes; High speed optical techniques; Micromanipulators; Micromechanical devices; Micropumps; Microstructure; Stereolithography; Ultrafast optics; Microfluidic devices; Multiphoton microfabrication; Optical trapping; microtransfer molding;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on

Conference_Location

Shanghai

Print_ISBN

978-1-4244-3829-7

Electronic_ISBN

978-1-4244-3830-3

Type

conf

DOI

10.1109/CLEOPR.2009.5292279

Filename

5292279