Title :
Femtosecond laser stereolithography and replication technique for MEMS application
Author_Institution :
Dept. of Mech. Eng., Yokohama Nat. Univ., Yokohama, Japan
Abstract :
Several types of optically driven micromachines such as a lobed micropump, viscous micropumps and micromanipulators were developed using two-photon microstereolithography. The movable microdevices can be reproduced by a membrane-assisted transfer molding process.
Keywords :
high-speed optical techniques; laser materials processing; membranes; micro-optomechanical devices; microfabrication; replica techniques; soft lithography; stereolithography; transfer moulding; two-photon processes; MEMS application; femtosecond laser stereolithography; lobed micropump; membrane-assisted transfer molding process; micromanipulators; movable microdevices; optically driven micromachines; replication technique; two-photon microstereolithography; viscous micropumps; Biomedical optical imaging; Biomembranes; Charge carrier processes; High speed optical techniques; Micromanipulators; Micromechanical devices; Micropumps; Microstructure; Stereolithography; Ultrafast optics; Microfluidic devices; Multiphoton microfabrication; Optical trapping; microtransfer molding;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292279
