DocumentCode
1973486
Title
An Approach for Versatile Highly-Uniform Movpe Growth - the Flow Controlled Stagnation Point Flow Reactor
Author
Kondo, Makoto ; Kuramata, Akito ; Fujii, Takuya ; Anayama, Chikashi ; Okazaki, Jiro ; Sekiguchi, Hiroshi ; Tanahashi, Toshiyuki ; Yamazaki, Susumu
Author_Institution
Fujitsu Laboratories Ltd., Japan
fYear
1992
fDate
8-11 Jun 1992
Firstpage
123
Lastpage
124
Keywords
Epitaxial growth; Epitaxial layers; Force control; Gallium arsenide; Hydrodynamics; Indium phosphide; Inductors; Laboratories; Large-scale systems; Temperature control;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.664973
Filename
664973
Link To Document