Title :
Fabrication of photonic crystal cavity laser using a combined lithography of laser holography and focused ion beam
Author :
Ahn, Sungmo ; Kim, Sihan ; Jeon, Heonsu ; Kim, Hyo Jin
Author_Institution :
Dept. of Phys. & Astron., Seoul Nat. Univ., Seoul, South Korea
Abstract :
To enable a large scale and high throughput fabrication of photonic crystal (PC) cavity lasers, we combined laser holography (for the background PC generation) and focused ion beam (for cavity formation). The resultant lasers exhibited threshold and output powers comparable to those of electron-beam generated ones.
Keywords :
focused ion beam technology; holography; laser cavity resonators; optical fabrication; photolithography; photonic crystals; combination lithography; focused ion beam; laser holography; optical fabrication; photonic crystal cavity laser; Holography; Indium phosphide; Ion beams; Laser excitation; Laser theory; Lithography; Optical device fabrication; Photonic crystals; Semiconductor lasers; Throughput; combination lithography; focused ion beam; laser holography; photonic crystal cavity laser;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292298
