Title :
Femtosecond laser processing of fused silica to create integrated microsystems
Author_Institution :
Micro- & Nano- Scale Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
Low-energy femtosecond laser pulses can be used to introduce various functionalities in fused silica that can be combined or distributed to form integrated microsystems suitable for optofluidics and optomechanics applications.
Keywords :
high-speed optical techniques; laser materials processing; femtosecond laser processing; fused silica; integrated microsystems; optofluidics; optomechanics; Biological materials; Glass; Nanostructured materials; Optical materials; Optical pulses; Silicon compounds;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292301
