Title :
High-q free-standing silicon nitride micordisk vertically coupled with on-chip waveguide
Author :
Weiqiang Xie ; Van Thourhout, Dries
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
Abstract :
We designed and fabricated silicon nitride micordisk-waveguide vertical coupling devices processed at a low temperature of 270°. We experimentally demonstrate an intrinsic quality factor of 7.2×104 in the disk with only 15μm radius operating near 1310nm.
Keywords :
Q-factor; micro-optics; optical design techniques; optical fabrication; optical materials; optical waveguides; silicon compounds; SiN; high-q free-standing silicon nitride microdisk; intrinsic quality factor; low temperature; on-chip waveguide; radius 15 mum; silicon nitride micordisk-waveguide vertical coupling devices; wavelength 1310 nm; Couplings; Optical device fabrication; Optical resonators; Optical waveguides; Silicon compounds; System-on-chip; Waveguide discontinuities;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
