Title :
Observation of 100 nm × 100 nm square holes on Pt thin film with scanning near-field optical microscope
Author :
Oshikane, Yasushi ; Kataoka, Toshihiko ; Nagai, Masahiko ; Goto, Toshiya ; Inoue, Haruyuki ; Nakano, Motohiro
Author_Institution :
Div. of Precision Sci. & Technol., Osaka Univ., Suita, Japan
Abstract :
A FIBed array of 100 nm square holes on Pt thin film is scanned by a scanning near-field optical microscope (SNOM) system with a 500 nm spherical probe. The holes and surface plasmon interferences are observed clearly.
Keywords :
focused ion beam technology; near-field scanning optical microscopy; platinum; surface plasmons; FIB; Pt; focused ion beam; platinum thin film; polystyrene sphere; scanning near-field optical microscope; surface plasmon interference; Atomic force microscopy; Optical arrays; Optical distortion; Optical films; Optical microscopy; Optical scattering; Optical surface waves; Probes; Scanning electron microscopy; Surface topography; SNOM; focused ion beam; platinum thin film; polystyrene sphere; surface plasmon;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292327
