A CPW MEMS Switch with Enhanced Bandwidth

Shunt capacitive RF-MEMS switches over coplanar waveguides exhibit low isolation in the down-state position and high return loss in the up-state position at low frequencies. At high frequencies, they have a dual behavior with respect to these characteristics, which can significantly limit their operation bandwidth, as discussed in the literature. This work presents further improvements in relation to the ones obtained in previous work that enlarge even more the bandwidth of this type of switches.