Title :
Scanless profilometry by means of VIPA installed optical interferometer
Author :
Morisaki, Takashi ; Ono, Hiroshi ; Shioda, Tatsutoshi
Author_Institution :
Dept. of Electr. Eng., Nagaoka Univ. of Technol., Nagaoka, Japan
Abstract :
A VIPA installed optical interferometer for scanless profilometry is proposed by displaying the applied delay time to a line-image sensor. The delay time was carried on spatially separated combs generated by the VIPA.
Keywords :
delays; light interferometers; optical arrays; VIPA; delay time; line-image sensor; optical interferometer; scanless profilometry; spatially separated combs; virtually imaged phased array; Frequency; Glass; High speed optical techniques; Optical films; Optical interferometry; Optical modulation; Optical refraction; Optical sensors; Optical variables control; Phase modulation; VIPA; optical frequency comb; optical interferometer; profilometry;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292338
