Title :
Heterogeneously integrated MIR silicon photonics
Author :
Yu Chen ; Hongtao Lin ; Juejun Hu ; Mo Li
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
By utilizing heterogeneous integration method, integrated silicon photonics on mid-IR compatible substrate has been fabricated and on-chip cavity-enhanced mid-IR spectroscopic analysis of organic chemicals has been demonstrated.
Keywords :
elemental semiconductors; infrared spectra; infrared spectroscopy; integrated optics; organic compounds; silicon; substrates; Si; heterogeneous integration method; integrated silicon photonics; mid-IR compatible substrate; on-chip cavity-enhanced mid-IR spectroscopic analysis; organic chemicals; Ethanol; Optical ring resonators; Optical waveguides; Silicon photonics; Substrates; System-on-chip;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
