Title :
Flexible crystalline silicon nanomembrane photonic crystal microcavity
Author :
Xiaochuan Xu ; Subbaraman, Harish ; Hosseini, Amir ; Chakravarty, Sumit ; Chen, Ray T.
Author_Institution :
Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We for the first time demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity, which shows a quality factor of 22000 and could be bent to a radius of 5 mm.
Keywords :
Q-factor; elemental semiconductors; flexible structures; microcavities; nanophotonics; nanostructured materials; optical materials; photonic crystals; silicon; Si; flexible crystalline; photonic crystal microcavity; quality factor; radius 5 mm; silicon nanomembrane; Bonding; Films; Microcavities; Photonic crystals; Photonics; Q-factor; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA